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"Impact of oxide liner properties on TSV Cu pumping and TSV stress."
Joke De Messemaeker et al. (2015)
- Joke De Messemaeker, O. Varela Pedreira
, A. Moussa, Nabi Nabiollahi, Kris Vanstreels, Stefaan Van Huylenbroeck, Harold Philipsen
, Patrick Verdonck, Bart Vandevelde, Ingrid De Wolf, Eric Beyne
, Kris Croes:
Impact of oxide liner properties on TSV Cu pumping and TSV stress. IRPS 2015: 4
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