"Trajectory tracking control for pneumatic actuated scan stage with time ..."

Wataru Ohnishi et al. (2016)

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DOI: 10.1109/IECON.2016.7793764

access: closed

type: Conference or Workshop Paper

metadata version: 2018-02-26

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Wataru Ohnishi, Hiroshi Fujimoto, Koichi Sakata, Atsushi Hara, Kazuaki Saiki:
Trajectory tracking control for pneumatic actuated scan stage with time delay compensation. IECON 2016: 5125-5130

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