"Dynamic modeling and input shaping of thermal bimorph MEMS actuators."

Dan O. Popa et al. (2003)

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DOI: 10.1109/ROBOT.2003.1241799

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-22

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Dan O. Popa, Byoung Hun Kang, John T. Wen, Harry E. Stephanou, George Skidmore, Aaron Geisberger:
Dynamic modeling and input shaping of thermal bimorph MEMS actuators. ICRA 2003: 1470-1475

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