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"La-doped ZrO2 based BEoL decoupling capacitors."
Wenke Weinreich et al. (2016)
- Wenke Weinreich, Konrad Seidel, Patrick Polakowski, Maximilian Drescher, A. Gummenscheimer, Mark G. Nolan, L. Cheng, D. H. Triyoso:
La-doped ZrO2 based BEoL decoupling capacitors. ICICDT 2016: 1-4
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