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"La-doped ZrO2 based BEoL decoupling capacitors."

Wenke Weinreich et al. (2016)

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DOI: 10.1109/ICICDT.2016.7542062

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-30

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  - conf/icicdt/WeinreichSPDGNC16
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  - https://dblp.org/rec/conf/icicdt/WeinreichSPDGNC16
Wenke Weinreich, Konrad Seidel, Patrick Polakowski, Maximilian Drescher, A. Gummenscheimer, Mark G. Nolan, L. Cheng, D. H. Triyoso:
La-doped ZrO2 based BEoL decoupling capacitors. ICICDT 2016: 1-4

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