"Defect Probability of Directed Self-Assembly Lithography: Fast ..."

Seongbo Shim, Woohyun Chung, Youngsoo Shin (2015)

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DOI: 10.1109/ICCAD.2015.7372598

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-24

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Seongbo Shim, Woohyun Chung, Youngsoo Shin:
Defect Probability of Directed Self-Assembly Lithography: Fast Identification and Post-Placement Optimization. ICCAD 2015: 404-409

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