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"Overlapping-aware throughput-driven stencil planning for E-beam lithography."

Jian Kuang, Evangeline F. Y. Young (2014)

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DOI: 10.1109/ICCAD.2014.7001360

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-24

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  dblp key:
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  persistent URL:
  - https://dblp.org/rec/conf/iccad/0001Y14
Jian Kuang, Evangeline F. Y. Young:
Overlapping-aware throughput-driven stencil planning for E-beam lithography. ICCAD 2014: 254-261

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