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"Directed Self-Assembly Based Cut Mask Optimization for Unidirectional Design."
Jiaojiao Ou et al. (2015)
- Jiaojiao Ou, Bei Yu, Jhih-Rong Gao, David Z. Pan, Moshe Preil, Azat Latypov:
Directed Self-Assembly Based Cut Mask Optimization for Unidirectional Design. ACM Great Lakes Symposium on VLSI 2015: 83-86
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