"Low-power DRAM-compatible Replacement Gate High-k/Metal Gate stacks."

Romain Ritzenthaler et al. (2012)

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DOI: 10.1109/ESSDERC.2012.6343378

access: closed

type: Conference or Workshop Paper

metadata version: 2021-05-20

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Romain Ritzenthaler, Tom Schram, Erik Bury, Jérôme Mitard, L.-Å. Ragnarsson, Guido Groeseneken, N. Horiguchi, Aaron Thean, Alessio Spessot, Christian Caillat, V. Srividya, Pierre Fazan:
Low-power DRAM-compatible Replacement Gate High-k/Metal Gate stacks. ESSDERC 2012: 242-245

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