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"Localized growth and functionalization of silicon nanowires for MEMS ..."

Stephen P. Arnold, S. M. Prokes, Mona E. Zaghloul (2005)

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DOI: 10.1109/ECCTD.2005.1523144

access: closed

type: Conference or Workshop Paper

metadata version: 2021-10-14

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Stephen P. Arnold, S. M. Prokes, Mona E. Zaghloul:
Localized growth and functionalization of silicon nanowires for MEMS sensor applications. ECCTD 2005: 397-400

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