"Fracturing-aware Curvilinear ILT via Circular E-beam Mask Writer."

Xinyun Zhang et al. (2024)

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DOI: 10.1145/3649329.3655926

access: closed

type: Conference or Workshop Paper

metadata version: 2024-11-30

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Xinyun Zhang, Su Zheng, Guojin Chen, Binwu Zhu, Hong Xu, Bei Yu:
Fracturing-aware Curvilinear ILT via Circular E-beam Mask Writer. DAC 2024: 134:1-134:6

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