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"Fracturing-aware Curvilinear ILT via Circular E-beam Mask Writer."
Xinyun Zhang et al. (2024)
- Xinyun Zhang
, Su Zheng
, Guojin Chen
, Binwu Zhu
, Hong Xu
, Bei Yu
:
Fracturing-aware Curvilinear ILT via Circular E-beam Mask Writer. DAC 2024: 134:1-134:6

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