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"Lamellar DSA-aware Detailed Routing Considering Double Patterning and ..."

Kuei-Lin Wu, Shao-Yun Fang (2023)

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DOI: 10.1109/DAC56929.2023.10247724

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-24

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Kuei-Lin Wu, Shao-Yun Fang:
Lamellar DSA-aware Detailed Routing Considering Double Patterning and Short Template Minimization. DAC 2023: 1-6

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