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"Model-based dummy feature placement for oxide chemical-mechanical ..."

Ruiqi Tian, D. F. Wong, Robert Boone (2000)

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DOI: 10.1145/337292.337609

access: closed

type: Conference or Workshop Paper

metadata version: 2022-10-02

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Ruiqi Tian, D. F. Wong, Robert Boone:
Model-based dummy feature placement for oxide chemical-mechanical polishing manufacturability. DAC 2000: 667-670

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