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"MOSAIC: Mask Optimizing Solution With Process Window Aware Inverse Correction."

Jhih-Rong Gao et al. (2014)

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DOI: 10.1145/2593069.2593163

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-06

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  dblp key:
  - conf/dac/GaoXYP14
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  - https://dblp.org/rec/conf/dac/GaoXYP14
Jhih-Rong Gao, Xiaoqing Xu, Bei Yu, David Z. Pan:
MOSAIC: Mask Optimizing Solution With Process Window Aware Inverse Correction. DAC 2014: 52:1-52:6

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