"Neural network based uniformity profile control of linear ..."

Jingang Yi, Ye Sheng, C. Shan Xu (2003)

> Home

Details and statistics

DOI: 10.1109/CDC.2003.1271963

access: closed

type: Conference or Workshop Paper

metadata version: 2022-03-07

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - conf/cdc/YiSX03
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/cdc/YiSX03
Jingang Yi, Ye Sheng, C. Shan Xu:
Neural network based uniformity profile control of linear chemical-mechanical planarization. CDC 2003: 5955-5960

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.