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"Towards STEM control: Modeling framework and development of a sensor for ..."
Arturo Tejada et al. (2009)
- Arturo Tejada, Wouter Van den Broek, Saartje W. van der Hoeven, Arnold J. den Dekker:
Towards STEM control: Modeling framework and development of a sensor for defocus control. CDC 2009: 8310-8315
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