"Variable Control Design and its Application to Wafer Scanners."

Marcel Heertjes, Nathan van de Wouw (2006)

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DOI: 10.1109/CDC.2006.377406

access: closed

type: Conference or Workshop Paper

metadata version: 2020-07-08

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Marcel Heertjes, Nathan van de Wouw:
Variable Control Design and its Application to Wafer Scanners. CDC 2006: 3724-3729

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