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"Convergence design considerations of low order Q-ILC for closed loop ..."

Branko G. Dijkstra, Okko H. Bosgra (2002)

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DOI: 10.1109/CDC.2002.1184211

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-25

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Branko G. Dijkstra, Okko H. Bosgra:
Convergence design considerations of low order Q-ILC for closed loop systems, implemented on a high precision wafer stage. CDC 2002: 2494-2499

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