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"Modeling and schedulability analysis of single-arm multi-cluster tools ..."

Qinghua Zhu et al. (2014)

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DOI: 10.1109/COASE.2014.6899308

access: closed

type: Conference or Workshop Paper

metadata version: 2021-02-04

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Qinghua Zhu, Naiqi Wu, Yan Qiao, MengChu Zhou:
Modeling and schedulability analysis of single-arm multi-cluster tools with residency time constraints via Petri nets. CASE 2014: 81-86

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