"Optimal scheduling of single-arm multi-cluster tools with two-space ..."

FaJun Yang et al. (2014)

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DOI: 10.1109/COASE.2014.6899307

access: closed

type: Conference or Workshop Paper

metadata version: 2025-11-08

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FaJun Yang, Naiqi Wu, Yan Qiao, MengChu Zhou:
Optimal scheduling of single-arm multi-cluster tools with two-space buffering modules. CASE 2014: 75-80

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