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"Optimization-based litho machine scheduling with load balancing and ..."

Bing Yan et al. (2012)

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DOI: 10.1109/COASE.2012.6386493

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-25

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Bing Yan, Hsin Yuan Chen, Peter B. Luh, Simon Wang, Joey Chang:
Optimization-based litho machine scheduling with load balancing and reticle expiration. CASE 2012: 575-580

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