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"Petri net-based scheduling analysis of dual-arm cluster tools with wafer ..."

Yan Qiao, Naiqi Wu, MengChu Zhou (2012)

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DOI: 10.1109/COASE.2012.6386329

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-25

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Yan Qiao, Naiqi Wu, MengChu Zhou:
Petri net-based scheduling analysis of dual-arm cluster tools with wafer revisiting. CASE 2012: 206-211

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