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"Hidden Markov model-based predictive maintenance in semiconductor ..."
Jakob Kinghorst et al. (2017)
- Jakob Kinghorst, Omid Geramifard, Ming Luo, Hian-Leng Chan, Khoo Yong, Jens Folmer, Minjie Zou, Birgit Vogel-Heuser:
Hidden Markov model-based predictive maintenance in semiconductor manufacturing: A genetic algorithm approach. CASE 2017: 1260-1267
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