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"Line-to-line repetitive control of a 6-DoF hexapod stage for overlay ..."

Gert Witvoet et al. (2019)

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DOI: 10.23919/ACC.2019.8814385

access: closed

type: Conference or Workshop Paper

metadata version: 2021-08-08

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Gert Witvoet, Joost Peters, Stefan Kuiper, Tom Oomen:
Line-to-line repetitive control of a 6-DoF hexapod stage for overlay measurements using Atomic Force Microscopy. ACC 2019: 2464-2469

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