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"Proposal of surface topography observer considering Z-scanner for ..."

Takayuki Shiraishi, Hiroshi Fujimoto (2010)

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DOI: 10.1109/ACC.2010.5531399

access: closed

type: Conference or Workshop Paper

metadata version: 2022-06-23

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Takayuki Shiraishi, Hiroshi Fujimoto:
Proposal of surface topography observer considering Z-scanner for high-speed AFM. ACC 2010: 2754-2759

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