"Design of a decoupling controller for electrostatically coupled ..."

Mariateresa Napoli, Bassam Bamieh (2004)

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DOI: 10.23919/ACC.2004.1384391

access: closed

type: Conference or Workshop Paper

metadata version: 2025-01-19

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Mariateresa Napoli, Bassam Bamieh:
Design of a decoupling controller for electrostatically coupled microcantilevers based on current measurement. ACC 2004: 3134-3139

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