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"Reduced-order modeling of thermally induced deformations on reticles for ..."
Can Bikcora, Siep Weiland, Wim M. J. Coene (2013)
- Can Bikcora, Siep Weiland, Wim M. J. Coene:
Reduced-order modeling of thermally induced deformations on reticles for extreme ultraviolet lithography. ACC 2013: 5542-5549
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