"Proposal of fast and high-precision control for ball-screw-driven stage by ..."

Hongzhong Zhu, Hiroshi Fujimoto (2014)

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DOI: 10.1109/AMC.2014.6823350

access: closed

type: Conference or Workshop Paper

metadata version: 2019-01-22

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Hongzhong Zhu, Hiroshi Fujimoto:
Proposal of fast and high-precision control for ball-screw-driven stage by explicitly considering elastic deformation. AMC 2014: 604-609

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