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"Conventional magnetron sputtering of metal seed layers on high aspect ..."

Young Sik Song, Yunho Han, Tai Hong Yim (2014)

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DOI: 10.1109/3DIC.2014.7152169

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-21

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Young Sik Song, Yunho Han, Tai Hong Yim:
Conventional magnetron sputtering of metal seed layers on high aspect ratio vias with tilting. 3DIC 2014: 1-4

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