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"Monolithic 3D-ICs with single crystal silicon layers."

Deepak C. Sekar, Zvi Or-Bach (2011)

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DOI: 10.1109/3DIC.2012.6262978

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-21

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Deepak C. Sekar, Zvi Or-Bach:
Monolithic 3D-ICs with single crystal silicon layers. 3DIC 2011: 1-2

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