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"Novel methodology for 3D MEMS-IC design and co-simulation on MEMS ..."
Tomasz Bieniek et al. (2014)
- Tomasz Bieniek, Grzegorz Janczyk, Magdalena Ekwinska, T. Budzynski, Piotr Gluszko, Piotr Grabiec, Andrzej Kociubinski
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Novel methodology for 3D MEMS-IC design and co-simulation on MEMS microphone smart system example. 3DIC 2014: 1-5
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