BibTeX record journals/cii/BleakieD13

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@article{DBLP:journals/cii/BleakieD13,
  author       = {Alexander Bleakie and
                  Dragan Djurdjanovic},
  title        = {Feature extraction, condition monitoring, and fault modeling in semiconductor
                  manufacturing systems},
  journal      = {Comput. Ind.},
  volume       = {64},
  number       = {3},
  pages        = {203--213},
  year         = {2013},
  url          = {https://doi.org/10.1016/j.compind.2012.10.002},
  doi          = {10.1016/J.COMPIND.2012.10.002},
  timestamp    = {Tue, 18 Feb 2020 09:54:17 +0100},
  biburl       = {https://dblp.org/rec/journals/cii/BleakieD13.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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