"Feature extraction, condition monitoring, and fault modeling in ..."

Alexander Bleakie, Dragan Djurdjanovic (2013)

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DOI: 10.1016/J.COMPIND.2012.10.002

access: closed

type: Journal Article

metadata version: 2020-02-18

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Alexander Bleakie, Dragan Djurdjanovic:
Feature extraction, condition monitoring, and fault modeling in semiconductor manufacturing systems. Comput. Ind. 64(3): 203-213 (2013)

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