BibTeX record conf/nems/TangLHWSY15

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@inproceedings{DBLP:conf/nems/TangLHWSY15,
  author       = {Yu{-}Hsiang Tang and
                  Yu{-}Hsin Lin and
                  Tsung{-}Tao Huang and
                  Jun{-}Sheng Wang and
                  Ming{-}Hua Shiao and
                  Chih{-}Sheng Yu},
  title        = {Investigation of fabricated Through Glass Via {(TGV)} process by inductively
                  coupled plasma reactive ion etching of quartz glass},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {401--404},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147453},
  doi          = {10.1109/NEMS.2015.7147453},
  timestamp    = {Mon, 14 Sep 2020 15:10:40 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/TangLHWSY15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}