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"Investigation of fabricated Through Glass Via (TGV) process by inductively ..."
Yu-Hsiang Tang et al. (2015)
- Yu-Hsiang Tang, Yu-Hsin Lin, Tsung-Tao Huang, Jun-Sheng Wang, Ming-Hua Shiao, Chih-Sheng Yu:
Investigation of fabricated Through Glass Via (TGV) process by inductively coupled plasma reactive ion etching of quartz glass. NEMS 2015: 401-404
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