BibTeX record conf/nems/KshirsagarDG11

download as .bib file

@inproceedings{DBLP:conf/nems/KshirsagarDG11,
  author       = {Abhijeet Kshirsagar and
                  Siddhartha Prakash Duttagupta and
                  Shashikala Achyut Gangal},
  title        = {Optimization and fabrication of low stress-low temperature silicon
                  oxide cantilevers},
  booktitle    = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
                  Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages        = {466--470},
  publisher    = {{IEEE}},
  year         = {2011},
  url          = {https://doi.org/10.1109/NEMS.2011.6017394},
  doi          = {10.1109/NEMS.2011.6017394},
  timestamp    = {Mon, 24 May 2021 20:49:46 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/KshirsagarDG11.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.