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"Optimization and fabrication of low stress-low temperature silicon oxide ..."

Abhijeet Kshirsagar, Siddhartha Prakash Duttagupta, Shashikala Achyut Gangal (2011)

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DOI: 10.1109/NEMS.2011.6017394

access: closed

type: Conference or Workshop Paper

metadata version: 2021-05-24

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Abhijeet Kshirsagar, Siddhartha Prakash Duttagupta, Shashikala Achyut Gangal:
Optimization and fabrication of low stress-low temperature silicon oxide cantilevers. NEMS 2011: 466-470

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