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Peter Gammel

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2000 – 2009

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2005
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Peter Gammel, Georg Fischer, Jérémie Bouchaud:
RF MEMS and NEMS technology, devices, and applications. Bell Labs Tech. J. 10(3): 29-59 (2005)
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Gary Elko, Flavio Pardo, Daniel López, David Bishop, Peter Gammel:
Capacitive MEMS microphones. Bell Labs Tech. J. 10(3): 187-198 (2005)

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