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"RF MEMS and NEMS technology, devices, and applications."

Peter Gammel, Georg Fischer, Jérémie Bouchaud (2005)

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DOI: 10.1002/BLTJ.20103

access: closed

type: Journal Article

metadata version: 2023-08-24

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Peter Gammel, Georg Fischer, Jérémie Bouchaud:
RF MEMS and NEMS technology, devices, and applications. Bell Labs Tech. J. 10(3): 29-59 (2005)

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