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Ziqiang Qu
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Journal Articles
- 2024
- [j2]Ziqiang Qu
, Hao Ouyang
, Wen Xiong
, Qiangwei Xu
, Yuan Wang
, Huafeng Liu
:
A Nano-g MOEMS Accelerometer Featuring Electromagnetic Force Balance With 157-dB Dynamic Range. IEEE Trans. Ind. Electron. 71(6): 6418-6426 (2024) - 2020
- [j1]Xiaoxiao Song
, Huafeng Liu
, Yanyan Fang, Chun Zhao
, Ziqiang Qu, Qiu Wang, Liang Cheng Tu
:
An Integrated Gold-Film Temperature Sensor for In Situ Temperature Measurement of a High-Precision MEMS Accelerometer. Sensors 20(13): 3652 (2020)
Conference and Workshop Papers
- 2023
- [c2]Shimin Jiao, Hao Ouyang, Ziqiang Qu, Qiu Wang, Huafeng Liu, Liang Cheng Tu:
An Opto-mechanical MEMS Accelerometer with Noise Floor of 40 ng/Hz1/2. NEMS 2023: 140-143 - 2020
- [c1]Ziqiang Qu, Huafeng Liu, Hao Ouyang, Chenyuan Hu, Liang Cheng Tu:
A High-sensitivity Optical MEMS Accelerometer based on SOI Double-side Micromachining. IEEE SENSORS 2020: 1-4
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last updated on 2024-04-29 21:25 CEST by the dblp team
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