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"A High-sensitivity Optical MEMS Accelerometer based on SOI Double-side ..."

Ziqiang Qu et al. (2020)

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DOI: 10.1109/SENSORS47125.2020.9278761

access: closed

type: Conference or Workshop Paper

metadata version: 2022-12-13

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  dblp key:
  - conf/ieeesensors/Qu0OHT20
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  - https://dblp.org/rec/conf/ieeesensors/Qu0OHT20
Ziqiang Qu, Huafeng Liu, Hao Ouyang, Chenyuan Hu, Liang Cheng Tu:
A High-sensitivity Optical MEMS Accelerometer based on SOI Double-side Micromachining. IEEE SENSORS 2020: 1-4

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