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2019
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Zhi-Feng Lou, Xiu-Peng Hao, Yin-Di Cai, Tien-Fu Lu, Xiao-Dong Wang, Kuang-Chao Fan:
An Embedded Sensor System for Real-Time Detecting 5-DOF Error Motions of Rotary Stages. Sensors 19(13): 2855 (2019)

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