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P. Godinat

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Informal and Other Publications

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2008
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  - journals/corr/abs-0805-0919
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Mathieu Puech, Jean-Marc Thevenoud, J. M. Gruffat, N. Launay, N. Arnal, P. Godinat:
Fabrication of 3D Packaging TSV using DRIE. CoRR abs/0805.0919 (2008)

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