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"Fabrication of 3D Packaging TSV using DRIE"
Mathieu Puech et al. (2008)
- Mathieu Puech, Jean-Marc Thevenoud, J. M. Gruffat, N. Launay, N. Arnal, P. Godinat:
Fabrication of 3D Packaging TSV using DRIE. CoRR abs/0805.0919 (2008)
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