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Marion M. Garver

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1992
[j1]
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Marion M. Garver, Joseph M. Bulger, Thomas E. Clark, Jamshed H. Dubash, Lorain M. Ross, Daniel J. Welch:
CMOS-4 Back-end Process Development for a VLSI 0.75 µm Triple-level Interconnection Technology. Digit. Tech. J. 4(2): 51-72 (1992)

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