BibTeX record journals/tcst/VeldmanFZWBN21

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@article{DBLP:journals/tcst/VeldmanFZWBN21,
  author       = {Daniel W. M. Veldman and
                  Rob H. B. Fey and
                  Hans Zwart and
                  Marc M. J. van de Wal and
                  Joris D. B. J. van den Boom and
                  Henk Nijmeijer},
  title        = {Optimal Thermal Actuation for Mitigation of Heat-Induced Wafer Deformation},
  journal      = {{IEEE} Trans. Control. Syst. Technol.},
  volume       = {29},
  number       = {2},
  pages        = {514--529},
  year         = {2021},
  url          = {https://doi.org/10.1109/TCST.2019.2948592},
  doi          = {10.1109/TCST.2019.2948592},
  timestamp    = {Wed, 07 Apr 2021 15:59:32 +0200},
  biburl       = {https://dblp.org/rec/journals/tcst/VeldmanFZWBN21.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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