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"Optimal Thermal Actuation for Mitigation of Heat-Induced Wafer Deformation."
Daniel W. M. Veldman et al. (2021)
- Daniel W. M. Veldman, Rob H. B. Fey, Hans Zwart, Marc M. J. van de Wal, Joris D. B. J. van den Boom, Henk Nijmeijer:
Optimal Thermal Actuation for Mitigation of Heat-Induced Wafer Deformation. IEEE Trans. Control. Syst. Technol. 29(2): 514-529 (2021)
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