BibTeX record journals/tcst/RosenPCCM01

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@article{DBLP:journals/tcst/RosenPCCM01,
  author       = {I. Gary Rosen and
                  Tyler Parent and
                  Carolyn Cooper and
                  Ping Chen and
                  Anupam Madhukar},
  title        = {A neural-network-based approach to determining a robust process recipe
                  for the plasma-enhanced deposition of silicon nitride thin films},
  journal      = {{IEEE} Trans. Control. Syst. Technol.},
  volume       = {9},
  number       = {2},
  pages        = {271--284},
  year         = {2001},
  url          = {https://doi.org/10.1109/87.911379},
  doi          = {10.1109/87.911379},
  timestamp    = {Mon, 08 Jun 2020 22:19:28 +0200},
  biburl       = {https://dblp.org/rec/journals/tcst/RosenPCCM01.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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