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BibTeX record journals/tcst/RosenPCCM01
@article{DBLP:journals/tcst/RosenPCCM01, author = {I. Gary Rosen and Tyler Parent and Carolyn Cooper and Ping Chen and Anupam Madhukar}, title = {A neural-network-based approach to determining a robust process recipe for the plasma-enhanced deposition of silicon nitride thin films}, journal = {{IEEE} Trans. Control. Syst. Technol.}, volume = {9}, number = {2}, pages = {271--284}, year = {2001}, url = {https://doi.org/10.1109/87.911379}, doi = {10.1109/87.911379}, timestamp = {Mon, 08 Jun 2020 22:19:28 +0200}, biburl = {https://dblp.org/rec/journals/tcst/RosenPCCM01.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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