Stop the war!

Остановите войну!

for scientists:

default search action

combined dblp search
author search
venue search
publication search

ask others

"A neural-network-based approach to determining a robust process recipe for ..."

I. Gary Rosen et al. (2001)

> Home

Details and statistics

DOI: 10.1109/87.911379

access: closed

type: Journal Article

metadata version: 2020-06-08

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - journals/tcst/RosenPCCM01
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/tcst/RosenPCCM01
I. Gary Rosen, Tyler Parent, Carolyn Cooper, Ping Chen, Anupam Madhukar:
A neural-network-based approach to determining a robust process recipe for the plasma-enhanced deposition of silicon nitride thin films. IEEE Trans. Control. Syst. Technol. 9(2): 271-284 (2001)

a service of

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.