BibTeX record journals/tase/ChienCHW14

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@article{DBLP:journals/tase/ChienCHW14,
  author       = {Chen{-}Fu Chien and
                  Ying{-}Jen Chen and
                  Chia{-}Yu Hsu and
                  Hung{-}Kai Wang},
  title        = {Overlay Error Compensation Using Advanced Process Control With Dynamically
                  Adjusted Proportional-Integral {R2R} Controller},
  journal      = {{IEEE} Trans Autom. Sci. Eng.},
  volume       = {11},
  number       = {2},
  pages        = {473--484},
  year         = {2014},
  url          = {https://doi.org/10.1109/TASE.2013.2280618},
  doi          = {10.1109/TASE.2013.2280618},
  timestamp    = {Tue, 04 Oct 2022 16:42:32 +0200},
  biburl       = {https://dblp.org/rec/journals/tase/ChienCHW14.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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