"Overlay Error Compensation Using Advanced Process Control With Dynamically ..."

Chen-Fu Chien et al. (2014)

> Home

Details and statistics

DOI: 10.1109/TASE.2013.2280618

access: closed

type: Journal Article

metadata version: 2022-10-04

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - journals/tase/ChienCHW14
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/tase/ChienCHW14
Chen-Fu Chien, Ying-Jen Chen, Chia-Yu Hsu, Hung-Kai Wang:
Overlay Error Compensation Using Advanced Process Control With Dynamically Adjusted Proportional-Integral R2R Controller. IEEE Trans Autom. Sci. Eng. 11(2): 473-484 (2014)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.